$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Impact of ZrO2 Dielectrics Thickness on Electrical Performance of TiO2 Thin Film Transistors with Sub-2 V Operation

Acs applied electronic materials, v.3 no.12, 2021년, pp.5483 - 5495  

Zhang, Jie (Department of Electrical and Computer Engineering , University of Delaware , Newark , Delaware 19716 , United States) ,  Jia, Meng (Department of Chemistry and Biochemistry , University of Delaware , Newark , Delaware 19716 , United States) ,  Sales, Maria Gabriela (Department of Materials Science and Engineering , University of Virginia , Charlottesville , Virginia 22904 , United States) ,  Zhao, Yong (Department of Materials Science and Engineering , University of Delaware , Newark , Delaware 19716 , United States) ,  Lin, Guangyang (Department of Electrical and Computer Engineering , University of Delaware , Newark , Delaware 19716 , United States) ,  Cui, Peng (Department of Electrical and Computer Engineering , University of Delaware , Newark , Delaware 19716 , United States) ,  Santiwipharat, Chaiwarut (Department of Electrical and Computer Engineering , University of Delaware , Newark ,) ,  Ni, Chaoying ,  McDonnell, Stephen ,  Zeng, Yuping

Abstract AI-Helper 아이콘AI-Helper

In the present work, the impact of ZrO2 gate dielectric thickness on the electrical performance of TiO2 thin film transistors (TFTs) is systematically investigated. Exhaustive electrical measurements on TFTs, metal-insulator-metal, and metal-oxide-semiconductor capacitors are carried out with varyin...

주제어

참고문헌 (71)

  1. Myny, Kris. The development of flexible integrated circuits based on thin-film transistors. Nature electronics, vol.1, no.1, 30-39.

  2. Petti, Luisa, Münzenrieder, Niko, Vogt, Christian, Faber, Hendrik, Büthe, Lars, Cantarella, Giuseppe, Bottacchi, Francesca, Anthopoulos, Thomas D., Tröster, Gerhard. Metal oxide semiconductor thin-film transistors for flexible electronics. Applied physics reviews : APR, vol.3, no.2, 021303-.

  3. Fortunato, E., Barquinha, P., Martins, R.. Oxide Semiconductor Thin‐Film Transistors: A Review of Recent Advances. Advanced materials, vol.24, no.22, 2945-2986.

  4. Banger, K. K., Yamashita, Y., Mori, K., Peterson, R. L., Leedham, T., Rickard, J., Sirringhaus, H.. Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ??sol??gel on chip?? process. Nature materials, vol.10, no.1, 45-50.

  5. Street, Robert A.. Thin-Film Transistors. Advanced materials, vol.21, no.20, 2007-2022.

  6. Pal, Bhola N., Dhar, Bal Mukund, See, Kevin C., Katz, Howard E.. Solution-deposited sodium beta-alumina gate dielectrics for low-voltage and transparent field-effect transistors. Nature materials, vol.8, no.11, 898-903.

  7. Zhang, Bo, Liu, Yu, Agarwal, Shweta, Yeh, Ming-Ling, Katz, Howard E.. Structure, Sodium Ion Role, and Practical Issues for β-alumina as a High-k Solution-Processed Gate Layer for Transparent and Low-Voltage Electronics. ACS applied materials & interfaces, vol.3, no.11, 4254-4261.

  8. Park, Jee Ho, Yoo, Young Bum, Lee, Keun Ho, Jang, Woo Soon, Oh, Jin Young, Chae, Soo Sang, Baik, Hong Koo. Low-Temperature, High-Performance Solution-Processed Thin-Film Transistors with Peroxo-Zirconium Oxide Dielectric. ACS applied materials & interfaces, vol.5, no.2, 410-417.

  9. Hong, Kihyon, Kim, Se Hyun, Lee, Keun Hyung, Frisbie, C. Daniel. Printed, sub‐2V ZnO Electrolyte Gated Transistors and Inverters on Plastic. Advanced materials, vol.25, no.25, 3413-3418.

  10. Xu, Wangying, Wang, Han, Xie, Fangyan, Chen, Jian, Cao, Hongtao, Xu, Jian-Bin. Facile and Environmentally Friendly Solution-Processed Aluminum Oxide Dielectric for Low-Temperature, High-Performance Oxide Thin-Film Transistors. ACS applied materials & interfaces, vol.7, no.10, 5803-5810.

  11. Yao, Rihui, Zheng, Zeke, Xiong, Mei, Zhang, Xiaochen, Li, Xiaoqing, Ning, Honglong, Fang, Zhiqiang, Xie, Weiguang, Lu, Xubing, Peng, Junbiao. Low-temperature fabrication of sputtered high-k HfO2 gate dielectric for flexible a-IGZO thin film transistors. Applied physics letters, vol.112, no.10, 103503-.

  12. Yang, Jun, Zhang, Yongpeng, Wu, Qianqian, Dussarrat, Christian, Qi, Jie, Zhu, Wenqing, Ding, Xingwei, Zhang, Jianhua. High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric. IEEE transactions on electron devices, vol.66, no.8, 3382-3386.

  13. Cho, Min Hoe, Choi, Cheol Hee, Seul, Hyeon Joo, Cho, Hyun Cheol, Jeong, Jae Kyeong. Achieving a Low-Voltage, High-Mobility IGZO Transistor through an ALD-Derived Bilayer Channel and a Hafnia-Based Gate Dielectric Stack. ACS applied materials & interfaces, vol.13, no.14, 16628-16640.

  14. Ma, Pengfei, Du, Lulu, Wang, Yiming, Jiang, Ran, Xin, Qian, Li, Yuxiang, Song, Aimin. Low voltage operation of IGZO thin film transistors enabled by ultrathin Al2O3 gate dielectric. Applied physics letters, vol.112, no.2, 023501-.

  15. Ma, Pengfei, Sun, Jiamin, Liang, Guangda, Li, Yunpeng, Xin, Qian, Li, Yuxiang, Song, Aimin. Half-volt operation of IGZO thin-film transistors enabled by ultrathin HfO2 gate dielectric. Applied physics letters, vol.113, no.6, 063501-.

  16. Cai, Wensi, Wilson, Joshua, Zhang, Jiawei, Brownless, Joseph, Zhang, Xijian, Majewski, Leszek Artur, Song, Aimin. Significant Performance Enhancement of Very Thin InGaZnO Thin-Film Transistors by a Self-Assembled Monolayer Treatment. Acs applied electronic materials, vol.2, no.1, 301-308.

  17. Dou, Wei, Tan, Yuanyuan. Dual-gate low-voltage transparent electric-double-layer thin-film transistors with a top gate for threshold voltage modulation. RSC advances, vol.10, no.14, 8093-8096.

  18. Pal, Nila, Sharma, Anand, Acharya, Vishwas, Chourasia, Nitesh K., Biring, Sajal, Pal, Bhola N.. Gate Interface Engineering for Subvolt Metal Oxide Transistor Fabrication by Using Ion-Conducting Dielectric with Mn2O3 Gate Interface. Acs applied electronic materials, vol.2, no.1, 25-34.

  19. Nomura, Kenji, Ohta, Hiromichi, Takagi, Akihiro, Kamiya, Toshio, Hirano, Masahiro, Hosono, Hideo. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature, vol.432, no.7016, 488-492.

  20. Seo, Dong Kyu, Kong, Bo Hyun, Cho, Hyung Koun. Composition Controlled Superlattice InGaO3(ZnO)m Thin Films by Thickness of ZnO Buffer Layers and Thermal Treatment. Crystal growth & design, vol.10, no.10, 4638-4641.

  21. Lee, Y.S., Dai, Z.M., Lin, C.I., Lin, H.C.. Relationships between the crystalline phase of an IGZO target and electrical properties of a-IGZO channel film. Ceramics international, vol.38, no.suppl1, S595-S599.

  22. Chu, Hsin-Chueh, Shen, Yung-Shao, Hsieh, Ching-Heng, Huang, Jia-Hong, Wu, Yung-Hsien. Low-Voltage Operation of ZrO2-Gated n-Type Thin-Film Transistors Based on a Channel Formed by Hybrid Phases of SnO and SnO2. ACS applied materials & interfaces, vol.7, no.28, 15129-15137.

  23. Katayama, Masao, Ikesaka, Shinya, Kuwano, Jun, Koinuma, Hideomi, Matsumoto, Yuji. High quality anatase TiO2 film: Field-effect transistor based on anatase TiO2. Applied physics letters, vol.92, no.13, 132107-.

  24. Jae-Woo Park, Dongyun Lee, Hakyoung Kwon, Seunghyup Yoo, Jongmoo Huh. Performance Improvement of N-Type $\hbox{TiO}_{x}$ Active-Channel TFTs Grown by Low-Temperature Plasma-Enhanced ALD. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.30, no.7, 739-741.

  25. Ni Zhong, Jun Jun Cao, Shima, H., Akinaga, H.. Effect of Annealing Temperature on $\hbox{TiO}_{2}$ -Based Thin-Film-Transistor Performance. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.33, no.7, 1009-1011.

  26. Choi, Kwang-Hyuk, Chung, Kwun-Bum, Kim, Han-Ki. d-orbital ordering of oxygen-deficient amorphous and anatase TiO2−x channels for high mobility thin film transistors. Applied physics letters, vol.102, no.15, 153511-.

  27. Yajima, Takeaki, Oike, Go, Nishimura, Tomonori, Toriumi, Akira. Independent control of phases and defects in TiO2 thin films for functional transistor channels. Physica status solidi. PSS. A, Applications and materials science, vol.213, no.8, 2196-2202.

  28. Sekizaki, S., Osada, M., Nagashio, K.. Molecularly-thin anatase field-effect transistors fabricated through the solid state transformation of titania nanosheets. Nanoscale, vol.9, no.19, 6471-6477.

  29. Kim, Brian S. Y., Minohara, Makoto, Hikita, Yasuyuki, Bell, Christopher, Hwang, Harold Y.. Atomically engineered epitaxial anatase TiO2 metal-semiconductor field-effect transistors. Applied physics letters, vol.112, no.13, 133506-.

  30. Zhang, Jie, Sales, Maria Gabriela, Lin, Guangyang, Cui, Peng, Pepin, Paul, Vohs, John M., Mcdonnell, Stephen, Zeng, Yuping. Ultrathin-Body TiO2 Thin Film Transistors With Record On-Current Density, ON/OFF Current Ratio, and Subthreshold Swing via O2 Annealing. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.40, no.9, 1463-1466.

  31. Zhao, Wei, Lv, Yuanjie, Feng, Xianjin, He, Linan, Xiao, Hongdi, Wang, Di, Ma, Jin. Fabrication and Characterization of High-Performance Thin-Film Transistors Based on Epitaxial Ta-Doped TiO2 Films. IEEE transactions on electron devices, vol.66, no.10, 4193-4197.

  32. Zhang, Jie, Cui, Peng, Lin, Guangyang, Zhang, Yuying, Sales, Maria Gabriela, Jia, Meng, Li, Zhengxin, Goodwin, Christopher, Beebe, Thomas, Gundlach, Lars, Ni, Chaoying, McDonnell, Stephen, Zeng, Yuping. High performance anatase-TiO2 thin film transistors with a two-step oxidized TiO2 channel and plasma enhanced atomic layer-deposited ZrO2 gate dielectric. Applied physics express, vol.12, no.9, 096502-.

  33. Zhang, Jie, Lin, Guangyang, Cui, Peng, Jia, Meng, Li, Zhengxin, Gundlach, Lars, Zeng, Yuping. Enhancement-/Depletion-Mode TiO2 Thin-Film Transistors via O2/N2 Preannealing. IEEE transactions on electron devices, vol.67, no.6, 2346-2351.

  34. 10.1109/IEDM.1984.190666 Liang, M.; Choi, J. Y.; Ko, P. K.; Hu, C. In Characterization of Very Thin Gate-Oxide MOS Devices , 1984 International Electron Devices Meeting, 9-12 Dec. 1984; 1984; pp 152-156. 

  35. Han, Yu-Pin, Mize, J.P., Moore, B.T., Pinto, J., Worley, R.. IIB-5 practical limitations of gate-oxide thickness minimization in the MOSFET. IEEE transactions on electron devices, vol.30, no.11, 1573-1574.

  36. Yeo, Yee-Chia, King, Tsu-Jae, Hu, Chenming. MOSFET gate leakage modeling and selection guide for alternative gate dielectrics based on leakage considerations. IEEE transactions on electron devices, vol.50, no.4, 1027-1035.

  37. Liang, Mong-Song, Choi, Jeong Yeol, Ko, Ping-Keung, Hu, Chenming. Inversion-layer capacitance and mobility of very thin gate-Oxide MOSFET's. IEEE transactions on electron devices, vol.33, no.3, 409-413.

  38. Baccarani, G., Wordeman, M.R.. Transconductance degradation in thin-Oxide MOSFET's. IEEE transactions on electron devices, vol.30, no.10, 1295-1304.

  39. Gao, Juan, He, Gang, Xiao, Dongqi, Jin, Peng, Jiang, Shanshan, Li, Wendong, Liang, Shuang, Zhu, Li. Passivation of Ge surface treated with trimethylaluminum and investigation of electrical properties of HfTiO/Ge gate stacks. Journal of materials science & technology, vol.33, no.8, 901-906.

  40. Zhang, J.W., He, G., Zhou, L., Chen, H.S., Chen, X.S., Chen, X.F., Deng, B., Lv, J.G., Sun, Z.Q.. Microstructure optimization and optical and interfacial properties modulation of sputtering-derived HfO2 thin films by TiO2 incorporation. Journal of alloys and compounds, vol.611, 253-259.

  41. Verweij, J.F., Klootwijk, J.H.. Dielectric breakdown I: A review of oxide breakdown. Microelectronics journal, vol.27, no.7, 611-622.

  42. Palumbo, Felix, Wen, Chao, Lombardo, Salvatore, Pazos, Sebastian, Aguirre, Fernando, Eizenberg, Moshe, Hui, Fei, Lanza, Mario. A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High‐k, and Layered Dielectrics. Advanced functional materials, vol.30, no.18, 1900657-.

  43. Dutta, Gourab, DasGupta, Nandita, DasGupta, Amitava. Effect of Sputtered-Al2O3 Layer Thickness on the Threshold Voltage of III-Nitride MIS-HEMTs. IEEE transactions on electron devices, vol.63, no.4, 1450-1458.

  44. He, Gang, Gao, Juan, Chen, Hanshuang, Cui, Jingbiao, Sun, Zhaoqi, Chen, Xiaoshuang. Modulating the Interface Quality and Electrical Properties of HfTiO/InGaAs Gate Stack by Atomic-Layer-Deposition-Derived Al2O3 Passivation Layer. ACS applied materials & interfaces, vol.6, no.24, 22013-22025.

  45. Balachandran, U., Eror, N.G.. Raman spectra of titanium dioxide. Journal of solid state chemistry, vol.42, no.3, 276-282.

  46. Chen, Kevin J., Yang, Shu, Liu, Shenghou, Liu, Cheng, Hua, Mengyuan. Toward reliable MIS‐ and MOS‐gate structures for GaN lateral power devices. Physica status solidi. PSS. A, Applications and materials science, vol.213, no.4, 861-867.

  47. Schroeder, Herbert, Schmitz, Sam. Thickness dependence of leakage currents in high-permittivity thin films. Applied physics letters, vol.83, no.21, 4381-4383.

  48. Baniecki, J. D., Shioga, T., Kurihara, K., Kamehara, N.. Investigation of the importance of interface and bulk limited transport mechanisms on the leakage current of high dielectric constant thin film capacitors. Journal of applied physics, vol.94, no.10, 6741-6748.

  49. Schroeder, Herbert. Poole-Frenkel-effect as dominating current mechanism in thin oxide films-An illusion?!. Journal of applied physics, vol.117, no.21, 215103-.

  50. Schroeder, Herbert, Schmitz, Sam, Meuffels, Paul. Leakage currents in high-permittivity thin films. Applied physics letters, vol.82, no.5, 781-783.

  51. He, G., Chen, X., Sun, Z.. Interface engineering and chemistry of Hf-based high-k dielectrics on III-V substrates. Surface science reports, vol.68, no.1, 68-107.

  52. Sangwon Lee, Sungwook Park, Sungchul Kim, Yongwoo Jeon, Kichan Jeon, Jun-Hyun Park, Jaechul Park, Ihun Song, Chang Jung Kim, Youngsoo Park, Dong Myong Kim, Dae Hwan Kim. Extraction of Subgap Density of States in Amorphous InGaZnO Thin-Film Transistors by Using Multifrequency Capacitance–Voltage Characteristics. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.31, no.3, 231-233.

  53. Lee, S., Jeon, Y.W., Kim, S., Kong, D., Kim, D.H., Kim, D.M.. Comparative study of quasi-static and normal capacitance-voltage characteristics in amorphous Indium-Gallium-Zinc-Oxide thin film transistors. Solid-state electronics, vol.56, no.1, 95-99.

  54. Chen, Hong-Chih, Kuo, Chuan-Wei, Chang, Ting-Chang, Lai, Wei-Chih, Chen, Po-Hsun, Chen, Guan-Fu, Huang, Shin-Ping, Chen, Jian-Jie, Zhou, Kuan-Ju, Shih, Chih-Cheng, Tsao, Yu-Ching, Huang, Hui-Chun, Sze, Simon M.. Investigation of the Capacitance-Voltage Electrical Characteristics of Thin-Film Transistors Caused by Hydrogen Diffusion under Negative Bias Stress in a Moist Environment. ACS applied materials & interfaces, vol.11, no.43, 40196-40203.

  55. Rahman, Md. Mamunur, Kim, Jun-Gyu, Kim, Dae-Hyun, Kim, Tae-Woo. Border Trap Extraction with Capacitance- Equivalent Thickness to Reflect the Quantum Mechanical Effect on Atomic Layer Deposition High-k/In0.53Ga0.47As on 300-mm Si Substrate. Scientific reports, vol.9, 9861-.

  56. Quang Ho Luc, Huy Binh Do, Minh Thien Huu Ha, Hu, Chenming Calvin, Yueh Chin Lin, Chang, Edward Yi. Plasma Enhanced Atomic Layer Deposition Passivated HfO2/AlN/In0.53Ga0.47As MOSCAPs With Sub-Nanometer Equivalent Oxide Thickness and Low Interface Trap Density. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.36, no.12, 1277-1280.

  57. Takei, Kuniharu, Kapadia, Rehan, Fang, Hui, Plis, E., Krishna, Sanjay, Javey, Ali. High quality interfaces of InAs-on-insulator field-effect transistors with ZrO2 gate dielectrics. Applied physics letters, vol.102, no.15, 153513-.

  58. Ye, G., Wang, H., Arulkumaran, S., Ng, G. I., Hofstetter, R., Li, Y., Anand, M. J., Ang, K. S., Maung, Y. K. T., Foo, S. C.. Atomic layer deposition of ZrO2 as gate dielectrics for AlGaN/GaN metal-insulator-semiconductor high electron mobility transistors on silicon. Applied physics letters, vol.103, no.14, 142109-.

  59. Zhu, Wenjuan, Low, Tony, Lee, Yi-Hsien, Wang, Han, Farmer, Damon B., Kong, Jing, Xia, Fengnian, Avouris, Phaedon. Electronic transport and device prospects of monolayer molybdenum disulphide grown by chemical vapour deposition. Nature communications, vol.5, 3087-.

  60. Liu, Shenghou, Yang, Shu, Tang, Zhikai, Jiang, Qimeng, Liu, Cheng, Wang, Maojun, Shen, Bo, Chen, Kevin J.. Interface/border trap characterization of Al2O3/AlN/GaN metal-oxide-semiconductor structures with an AlN interfacial layer. Applied physics letters, vol.106, no.5, 051605-.

  61. Cui, Peng, Zhang, Jie, Jia, Meng, Lin, Guangyang, Wei, Lincheng, Zhao, Haochen, Gundlach, Lars, Zeng, Yuping. InAlN/GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer-deposited ZrO2 as gate dielectric. Japanese journal of applied physics, vol.59, no.2, 020901-.

  62. Löckinger, Johannes, Nishiwaki, Shiro, Weiss, Thomas P., Bissig, Benjamin, Romanyuk, Yaroslav E., Buecheler, Stephan, Tiwari, Ayodhya N.. TiO2 as intermediate buffer layer in Cu(In,Ga)Se2 solar cells. Solar energy materials and solar cells : an international journal devoted to photovoltaic, photothermal, and photochemical solar energy conversion, vol.174, 397-404.

  63. Lin, Guangyang, Zhao, Meng-Qiang, Jia, Meng, Zhang, Jie, Cui, Peng, Wei, Lincheng, Zhao, Haochen, Johnson, A T Charlie, Gundlach, Lars, Zeng, Yuping. Performance enhancement of monolayer MoS2 transistors by atomic layer deposition of high-k dielectric assisted by Al2O3 seed layer. Journal of physics. D, applied physics, vol.53, no.10, 105103-.

  64. Isakov, Ivan, Faber, Hendrik, Mottram, Alexander D., Das, Satyajit, Grell, Max, Regoutz, Anna, Kilmurray, Rebecca, McLachlan, Martyn A., Payne, David J., Anthopoulos, Thomas D.. Quantum Confinement and Thickness‐Dependent Electron Transport in Solution‐Processed In2O3 Transistors. Advanced electronic materials, vol.6, no.11, 2000682-.

  65. You-Hang Wang, Qian Ma, Li-Li Zheng, Wen-Jun Liu, Shi-Jin Ding, Hong-Liang Lu, Zhang, David Wei. Performance Improvement of Atomic Layer-Deposited ZnO/Al2O3 Thin-Film Transistors by Low-Temperature Annealing in Air. IEEE transactions on electron devices, vol.63, no.5, 1893-1898.

  66. Sheng, Jiazhen, Park, Jozeph, Choi, Dong-won, Lim, Junhyung, Park, Jin-Seong. A Study on the Electrical Properties of Atomic Layer Deposition Grown InOx on Flexible Substrates with Respect to N2O Plasma Treatment and the Associated Thin-Film Transistor Behavior under Repetitive Mechanical Stress. ACS applied materials & interfaces, vol.8, no.45, 31136-31143.

  67. He, Gang, Liu, Jiangwei, Chen, Hanshuang, Liu, Yanmei, Sun, Zhaoqi, Chen, Xiaoshuang, Liu, Mao, Zhang, Lide. Interface control and modification of band alignment and electrical properties of HfTiO/GaAs gate stacks by nitrogen incorporation. Journal of materials chemistry. C, Materials for optical and electronic devices, vol.2, no.27, 5299-5308.

  68. Puthenkovilakam, Ragesh, Chang, Jane P.. Valence band structure and band alignment at the ZrO2/Si interface. Applied physics letters, vol.84, no.8, 1353-1355.

  69. Chung, Yun-Yan, Tsai, Ming-Li, Ho, Yen-Teng, Tseng, Yuan-Chieh, Chien, Chao-Hsin. Study of the Band Alignment between Atomic-Layer-Deposited High-κ Dielectrics and MoS2 Film. ECS journal of solid state science and technology : jss, vol.7, no.4, N46-N50.

  70. Lu, Hong-Liang, Yang, Ming, Xie, Zhang-Yi, Geng, Yang, Zhang, Yuan, Wang, Peng-Fei, Sun, Qing-Qing, Ding, Shi-Jin, Wei Zhang, David. Band alignment and interfacial structure of ZnO/Si heterojunction with Al2O3 and HfO2 as interlayers. Applied physics letters, vol.104, no.16, 161602-.

  71. He, Gang, Deng, Bin, Chen, Hanshuang, Chen, Xiaoshuang, Lv, Jianguo, Ma, Yongqing, Sun, Zhaoqi. Effect of dimethylaluminumhydride-derived aluminum oxynitride passivation layer on the interface chemistry and band alignment of HfTiO-InGaAs gate stacks. APL materials, vol.1, no.1, 012104-.

관련 콘텐츠

저작권 관리 안내
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로