초록 ▼

A system for the automated transfer of semiconductor wafers between a cassette and a wafer processing chamber. Included in the system are a cassette conveyor assembly, a wafer transfer assembly and a wafer handling assembly associated with the entrance to the processing chamber. Wafers of any standa

A system for the automated transfer of semiconductor wafers between a cassette and a wafer processing chamber. Included in the system are a cassette conveyor assembly, a wafer transfer assembly and a wafer handling assembly associated with the entrance to the processing chamber. Wafers of any standard size can be accommodated by the system. The cassette conveyor assembly includes a cassette holder which retains and precisely positions two standard plastic cassettes. The cassette holder is positioned by a ball reverser driven by a motor and a mechanical stepper. The wafer transfer assembly includes an elevator blade which vertically raises and lowers wafers to and from the wafer handling assembly. The elevator blade is actuated by a crank driven by a motor and a mechanical stepper. The crank provides a high rate of wafer transfer and a low risk of wafer damage.

대표청구항 ▼

In an automated wafer transfer system, apparatus for accurately positioning a cassette of the type having outwardly extending ribs along opposite sides thereof for access to individual wafers from below by a vertical wafer lift mechanism, said apparatus comprising: a cassette holder comprising a hou

In an automated wafer transfer system, apparatus for accurately positioning a cassette of the type having outwardly extending ribs along opposite sides thereof for access to individual wafers from below by a vertical wafer lift mechanism, said apparatus comprising: a cassette holder comprising a housing having a generally open top and bottom for access by said lift mechanism, cassette adaptor means including an adaptor plate mountable to the top of said housing and having an aperture corresponding in size to said cassette and cassette support means positioned for support of the cassette in said aperture by said outwardly extending ribs, and cassette retention means including a spring-loaded retention bar operative to bear against an end of the cassette and to retain it in a predetermined position in said cassette holder; and means for positioning said cassette holder relative to said vertical wafer lift mechanism.